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Abstract This letter reports the demonstration and electrical characterization of high-voltage AlN metal-semiconductor field-effect transistors (MESFETs) on single-crystal AlN substrates. Compared with AlN MESFETs on foreign substrates, the AlN-on-AlN MESFETs showed high breakdown voltages of over 2 kV for drain-to-gate spacing of 15 μm and one of the highest average breakdown fields among reported AlN MESFETs. Additionally, the devices also exhibited decent drain saturation current and on/off ratio without complicated regrown or graded contact layers, which are several times higher than those of reported AlN-on-sapphire MESEFTs. This work is beneficial for the future development of ultrawide bandgap AlN power electronics. 

Abstract This letter reports the demonstration of lateral AlN Schottky barrier diodes (SBDs) on single-crystal AlN substrates by metalorganic CVD (MOCVD) with an ultra-low ideality factor (η) of 1.65, a high Schottky barrier height of 1.94 eV, a breakdown voltage (BV) of 640 V, and a record high normalizedBVby the anode-to-cathode distance. The device current was dominated by thermionic emission, while most previously reported AlN SBDs suffered from defect-induced current with higherη(>4). This work represents a significant step towards high-performance ultra-wide bandgap AlN-based high-voltage and high-power devices. 

Pumping is an essential component in many microfluidic applications. Developing simple, small-footprint, and flexible pumping methods is of great importance to achieve truly lab-on-a-chip systems. Here, we report a novel acoustic pump based on the atomization effect induced by a vibrating sharp-tip capillary. As the liquid is atomized by the vibrating capillary, negative pressure is generated to drive the movement of fluid without the need to fabricate special microstructures or use special channel materials. We studied the influence of the frequency, input power, internal diameter (ID) of the capillary tip, and liquid viscosity on the pumping flow rate. By adjusting the ID of the capillary from 30 µm to 80 µm and the power input from 1 Vpp to 5 Vpp, a flow rate range of 3 to 520 µL/min can be achieved. We also demonstrated the simultaneous operation of two pumps to generate parallel flow with a tunable flow rate ratio. Finally, the capability of performing complex pumping sequences was demonstrated by performing a bead-based ELISA in a 3D-printed microdevice.